The temperature and humidity of the decontamination project clean room are mainly determined according to your processing technology requirements. In the satisfaction of the processing technology, the first choice should consider human comfort. With the improvement of the air cleanliness requirements, the temperature and humidity requirements of the process are getting higher and higher, and must reach a certain level of temperature and humidity. For example, in the lithography exposure process of large-scale integrated circuit production, the difference in thermal expansion coefficient between the glass and the silicon wafer as a mask material is required to be smaller and smaller. 100 um diameter silicon wafer, the temperature rise of 1 degree, it caused a linear expansion of 0.24um, it must have a constant temperature of ± 0.1 degrees, while the required humidity is generally lower, because people sweat, the product will be polluted, in particular It is a semiconductor workshop that is afraid of sodium. This workshop should not exceed 25 degrees. Excessive humidity creates more problems. When the relative humidity exceeds 55%, condensation occurs on the cooling water pipe wall. If it occurs in a precision device or circuit, it can cause various accidents. Relative humidity is rusted at 50%.
However, for most clean rooms, it is necessary to maintain the internal pressure (static pressure) higher than the external pressure (static pressure) in order to prevent intrusion of external contamination. The maintenance of pressure difference should generally meet the following principles:
1. The pressure of a room with a high cleanliness level is higher than the pressure of a space with a low cleanliness level adjacent to it.
2. The door between the cleanrooms must be open to rooms of high cleanliness level.
3 The pressure of the clean room is higher than the pressure of the unclean room.
The maintenance of the pressure difference depends on the amount of fresh air, which should be able to compensate for the amount of air leaking from the gap under this pressure difference. So the physical meaning of the pressure difference is the resistance to leakage (or penetration) when the air volume passes through various gaps in the clean room.
For the turbulent clean room, the degree of indoor pollution is mainly reduced by the dilution effect of air, so the concept of air exchange times is mainly used instead of the concept of speed directly, but the following requirements are also required for the indoor air flow rate;
1. The air velocity at the air outlet of the air outlet should not be too large. Compared with a simple air-conditioned room, it requires faster speed attenuation and a greater spread angle.
2. The air flow rate blowing through the horizontal plane (for example, the side feed speed) should not be too large, so as not to blow the surface particles back to the air flow, causing re-contamination. This speed is generally not suitable for large dry 0.2m/s.
In China, "air clean technical measures" and "clean plant design specifications" are vertical parallel flow (laminar flow) clean rooms ≥0.25 m/s as specified above.
Horizontal parallel flow (laminar flow) clean room ≥ 0.35 m/s
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Shanghai Tianhao Purification Engineering Co., Ltd. Address: Room 1809, 1810 and 1811, Building 3, No. 277, Zheqiao Road, Pudong New Area, Shanghai (Biyun International)
Tel 021-51923309
Fax: 201206
QQ: 1563701854
Taobao Wangwang: Tianyun purification Alibaba:tianyunjinghua
************************************************** **********
However, for most clean rooms, it is necessary to maintain the internal pressure (static pressure) higher than the external pressure (static pressure) in order to prevent intrusion of external contamination. The maintenance of pressure difference should generally meet the following principles:
1. The pressure of a room with a high cleanliness level is higher than the pressure of a space with a low cleanliness level adjacent to it.
2. The door between the cleanrooms must be open to rooms of high cleanliness level.
3 The pressure of the clean room is higher than the pressure of the unclean room.
The maintenance of the pressure difference depends on the amount of fresh air, which should be able to compensate for the amount of air leaking from the gap under this pressure difference. So the physical meaning of the pressure difference is the resistance to leakage (or penetration) when the air volume passes through various gaps in the clean room.
For the turbulent clean room, the degree of indoor pollution is mainly reduced by the dilution effect of air, so the concept of air exchange times is mainly used instead of the concept of speed directly, but the following requirements are also required for the indoor air flow rate;
1. The air velocity at the air outlet of the air outlet should not be too large. Compared with a simple air-conditioned room, it requires faster speed attenuation and a greater spread angle.
2. The air flow rate blowing through the horizontal plane (for example, the side feed speed) should not be too large, so as not to blow the surface particles back to the air flow, causing re-contamination. This speed is generally not suitable for large dry 0.2m/s.
In China, "air clean technical measures" and "clean plant design specifications" are vertical parallel flow (laminar flow) clean rooms ≥0.25 m/s as specified above.
Horizontal parallel flow (laminar flow) clean room ≥ 0.35 m/s
************************************************** **********
Shanghai Tianhao Purification Engineering Co., Ltd. Address: Room 1809, 1810 and 1811, Building 3, No. 277, Zheqiao Road, Pudong New Area, Shanghai (Biyun International)
Tel 021-51923309
Fax: 201206
QQ: 1563701854
Taobao Wangwang: Tianyun purification Alibaba:tianyunjinghua
************************************************** **********
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